OEM spectrophotometer ESCORT SM

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OEM spectrophotometer ESCORT SM

for optical coating deposition monitoring

 (Precise Broadband optical monitor)

SOL instruments has many years' experience in development and production of optical monitoring systems for various technological processes.

OEM spectrophotometer ESCORT SM is a high-end instrument based on innovative investigations of spectral devices and precise measuring systems, with no analogs on the market.

OEM spectrophotometer ESCORT SM provides precise and rapid measurements of emission (E) spectrum of evaporated material, transmission (T) or reflected (R) spectra of deposited coating, the automatic control and optimization of deposition process (Control&Optimization System).

 

 

 

 

 

 

SOL instruments: спектрометр, рамановский микроскоп, эмиссионный спектрометр. fig1 ESCORT 435x315

 

Purpose

  • ESCORT SM spectrophotometer is a specialized OEM complex that measures optical coating parameters in the process of deposition and after the process, in the vacuum sputtering chambers of various types.
  • ESCORT SM spectrophotometer has measuring channel of broadband monitoring (S125) and measuring channel of single wavelength monitoring (M450)
  • ESCORT SM spectrophotometer enables to measure transmittance (T) or reflectance (R) simultaneously through two measuring channels and displays these coating parameters for automatic deposition process control.
  • The measuring channel of broadband monitoring allows simultaneous measurement of a spectrum for all wavelength ranges. The measuring channel of single wavelength monitoring measures coating parameters at the selected wavelength precisely and synchronously with the broadband channel.
  • The single wavelength channel allows precise spectrum measurements after the deposition process by scanning in the defined spectral range with the set step.

 

Functions

  • Measurements of emission, transmission and reflection spectra
  • Measurements of emission value, transmittance, optical density value and reflectance at fixed wavelength
  • Kinetic measurements at selected wavelength
  • Statistical characteristics calculation

 

Features

  • Monochromatic and broadband optical monitoring with two independent measuring channels: broadband (BBOM) and single wavelength (SWOM)
  • High performance original optical schemes
  • 3,5" embedded personal computer that performs rapid processing of the measurement results and data transferring to the external software that controls a vacuum chamber
  • Embedded color TFT-LCD Touch Screen module based on 3,5" PC or РС104 and internal software for stand-alone operation. External computer connection through high-speed interface 10/100 Ethernet, connection to a company's local network
 

Examples of use

SOL instruments: спектрометр, рамановский микроскоп, эмиссионный спектрометр. shema propuskanie eng

Reflection coefficient measurement of rotated sample in the vacuum chamber during the coating deposition process.

 

SOL instruments: спектрометр, рамановский микроскоп, эмиссионный спектрометр. shema propuskanie otrajenija eng

Transmission coefficient or reflection coefficient measurement of rotated sample in the vacuum chamber during the coating deposition process.