ESCORT SM: optical coating deposition monitoring

OEM spectrophotometer ESCORT SM is a precise Broadband Optical Monitor, designed by SOL instruments specially for measuring the parameters of optical coatings in the vacuum sputtering chambers of various types, during the deposition process and after the deposition.

ESCORT SM is created to build an optical monitoring system on its basis: it allows you to control the thickness of the sprayed material with an accuracy of up to 0.2 nm. The spectrophotometric complex ESCORT SM is a specialized high-end instrument based on innovative investigations in the areas of spectral devices and precise measuring systems, which has no analogs on the market.

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Description of the Broadband Optical Monitor ESCORT SM

Purpose of the OEM spectrophotometer ESCORT SM

  • ESCORT SM spectrophotometer is a specialized OEM complex that measures optical coating parameters in the process of deposition and after the process, in the vacuum sputtering chambers of various types.
  • ESCORT SM has measuring channel of broadband monitoring S125, and measuring channel of single wavelength monitoring M450.
  • ESCORT SM spectrophotometer enables to measure transmittance (T) or reflectance (R) simultaneously through two measuring channels and displays these coating parameters for automatic deposition process control.
  • The measuring channel of broadband monitoring allows simultaneous measurement of a spectrum for all wavelength ranges. The measuring channel of single wavelength monitoring measures coating parameters at the selected wavelength precisely and synchronously with the broadband channel.
  • The single wavelength channel allows precise spectrum measurements after the coating deposition process by scanning in the defined spectral range with the set step.

Measuring functions

  • Measurements of emission, transmission and reflection spectra.
  • Measurements of emission value, transmittance, optical density value and reflectance at fixed wavelength.
  • Kinetic measurements at selected wavelength.
  • Statistical characteristics calculation.

Features of the OEM spectrophotometer ESCORT SM

  • Monochromatic and broadband optical monitoring with two independent measuring channels: broadband optical monitoring (BBOM) and single wavelength optical monitoring (SWOM).
  • High performance original optical schemes.
  • 3,5″ embedded personal computer that performs rapid processing of the measurement results and data transferring to the external software that controls a vacuum chamber.
  • Embedded color TFT-LCD Touch Screen module based on 3,5″ PC or РС104 and internal software for stand-alone operation. External computer connection through high-speed interface 10/100 Ethernet.
  • Connection to the company’s local network.

Example of use

Application example of Broadband Optical Monitor ESCORT SM
Transmission coefficient or reflection coefficient measurement of rotated sample in the vacuum chamber during the coating deposition process.

Specification of the Broadband Optical Monitor ESCORT SM

ParameterChannel S125Channel М450
Spectral device:spectrographmonochromator with double dispersion
Focal length:125 mm450 mm (225 x 2)
Spectral range:from 380 to 1100 nmfrom 380 to 850 nm
Spectral slits of spectral device:fixed slit, width 0.04 mmadjustable, width from 0.2 to 2 mm
Spectral interval:from 1.35 to 3.4 nmfrom 0.3 to 3 nm
Minimal period of spectral measurement:2 ms/spectrum2 ms/point
Minimal step of spectral scanning:0.37 nm/pixel0.1 nm
Absolute error of wavelength setting:±0.4 nm±0.2 nm
Reproducibility of wavelength setting:±0.2 nm±0.1 nm
Stray light:0.1 % (at λ = 450 nm)0.005 % (at λ = 400 nm)
Photometric noise:0.07 %0.015 %
Photometric accuracy:±0.5 %±0.2 %
Photometric reproducibility (convergence, repeatability):±0.15 %±0.05 %
Emission detectors:CCDPMT
Emission spectrum measuring option:yesno
Emission input into the spectral device:optical fiberoptical fiber
Synchronization type:internal; externalinternal; external
Ports for additional external devices:Ethernet, USB, RS 232, VGA, PS/2Ethernet, USB, RS 232, VGA, PS/2
Dimensions:483 x 600 x 177 mm483 x 600 x 177 mm
Weight:25 kg25 kg
Power consumption:230 V, 50 Hz, 200 V•А230 V, 50 Hz, 200 V•А

Channel S125

  • Spectral device: spectrograph
  • Focal length: 125 mm
  • Spectral range: from 380 to 1100 nm
  • Spectral slits of spectral device: fixed slit, width 0.04 mm
  • Spectral interval: from 1.35 to 3.4 nm
  • Minimal period of spectral measurement: 2 ms/spectrum
  • Minimal step of spectral scanning: 0.37 nm/pixel
  • Absolute error of wavelength setting: ±0.4 nm
  • Reproducibility of wavelength setting: ±0.2 nm
  • Stray light: 0.1 % (at λ = 450 nm)
  • Photometric noise: 0.07 %
  • Photometric accuracy: ±0.5 %
  • Photometric reproducibility (convergence, repeatability): ±0.15 %
  • Emission detectors: CCD
  • Emission spectrum measuring option: yes
  • Emission input into the spectral device: optical fiber
  • Synchronization type: internal; external
  • Ports for additional external devices: Ethernet, USB, RS 232, VGA, PS/2
  • Dimensions: 483 x 600 x 177 mm
  • Weight: 25 kg
  • Power consumption: 230 V, 50 Hz, 200 V•А

Channel М450

  • Spectral device: monochromator with double dispersion
  • Focal length: 450 mm (225 x 2)
  • Spectral range: from 380 to 850 nm
  • Spectral slits of spectral device: adjustable, width from 0.2 to 2 mm
  • Spectral interval: from 0.3 to 3 nm
  • Minimal period of spectral measurement: 2 ms/spectrum
  • Minimal step of spectral scanning: 0.1 nm
  • Absolute error of wavelength setting: ±0.2 nm
  • Reproducibility of wavelength setting: ±0.1 nm
  • Stray light: 0.005 % (at λ = 400 nm)
  • Photometric noise: 0.015 %
  • Photometric accuracy: ±0.2 %
  • Photometric reproducibility (convergence, repeatability): ±0.05 %
  • Emission detectors: PMT
  • Emission spectrum measuring option: no
  • Emission input into the spectral device: optical fiber
  • Synchronization type: internal; external
  • Ports for additional external devices: Ethernet, USB, RS 232, VGA, PS/2
  • Dimensions: 483 x 600 x 177 mm
  • Weight: 25 kg
  • Power consumption: 230 V, 50 Hz, 200 V•А

Auxiliary equipment for OEM spectrophotometer ESCORT SM

Accessories

  • Module for measurement of specular reflectance (with reference sample included).

  • Fiber optics bundle for connection with a vacuum chamber or external sample chamber.
  • External sample chamber.
  • Set of certified optical filters for test (verification) of the spectrophotometric complex ESCORT SM.

Peripherals

Though ESCORT SM operates independently, the following external devices can be connected to the OEM spectrophotometer:

  • printer (connected through USB port) for printing out of measurement results;
  • standard keyboard for data entering and editing;
  • mouse for enhancing operations in graphic interface of the internal software;
  • external monitor;
  • external PC for enhancing ESCORT SM capabilities to solve non-standard measuring tasks.

With an external PC the special software or customized software is supplied.